«  »

Жидкостное химическое травление (WinWord&CorelDraw)







. . .



:



: . .

: . .

1996 .

. .

.

.

1. . 3

1.1. . 5

1.2. . 8

1.3. . 9

2. . 11

2.1. SiO2. 11

2.2. . 14

2.3. . 19

2.4. . 20

2.5. . 21

2.6. . 23

3. 23

.

3.1. . 24

4. . 25

5. . 26

.

()
, ,
, ,
.


.

( );
. -
,
() (() (. . 1).
,
((0.1 ),
((0.5 )
(1.0 (1.0 .

. 1.

.


( )
D .
,
(L),
, D/L((1 (. 2).

,
- L D.
.
, (D)
(L).
D ,
.
L/D,
.

, ..

, , .

-
.

. 2. () ()

. R-, S-.


,
.
.
.

,

. 3. ( ),

(D/L>2) .


. . 3

. D/L 1 (
).
(, (r
(L):

(r=(-2L. (1)

. 4. (W) () .
Si3N4 0.25 .

1- (D/L=3)
0.2 1 ,
() 0.05-0.1
.
D/L=10, 1
0.7 .
Si3N4
. 4.



.



+(;

,
. Al
Si Cu,
Al (. 1).
, ,
.
, ,
.
, ,
, .
,
(F
+(S, (
( )

(F=(-(S. (2)

,
, (=+11 /:

SiO2(.)+6HF(.)(2SiF6+2H2O. (3)

1. .



Ag, Al, Au, Cr, Cu, Mo, Ni, Pb, Pt, Ta, Ti,W

Si, Ge, GaAs



SiO2, Si3N4, ,


. , ,
, , ,
.

(. 2).

2. .






(111)

(110)

(100)

0.58

0.71

1.00

0.62

0.89

1.00


( )



(.) (n+(.)+ne. (4)

:

(.) (() , (5)

() ( n+()+ne , (6)

n+()+2 ( n+(.) . (7)


( ), (
().
( )
.
,
( 4), (. 5),
. , ,
. n+ ,
( ).


. 5.
(+) (-).

.
- .
- ,
:

ne+ Xn- (Xn. (8)

- , (F,

(F=-n(, (9)

( , -
. :

1) , , ,
;

2) ;

3) ;

4) ;

5) .

,
- :

SiO2+6HF (H2SiF6+2H2O, (10)

SiO2+CF4() (SiF4+CO2. (11)

Si(O- Si(F. Si(O Si(F
, , .

.

,
.
:

1) ;

2) (ads;

3) (F;

4) (vap;

5) .

.


=k , (12)

=kE . (13)

()
.

.

(. .
, ).
.
,
.
(
) .
.

-
- .
,
:

1) (
;

2) ( ,
;

3) ( , ,
.

.



+ (k( (14)



SiO2(.)+6HF(.) ( H2SiF6+2H2O, (15)

SiO2+CF4 ( SiF4+CO2. (16)

r

r=(m/d)/(M/D), (17)



. 7. ()
(R).
. ,

.
(. 8). dM,
S dt, S , dM,
dC/dx x
S

dM/dt=-DSdC/dx, (18)

S. - -
.
- . D
(():

D=RT/(, (19) dM/dt= (

(D (1/(, (20) (D=constT, (21) (=exp(Evis/RT), (22)

Evis=Eetch. (23)

:

1) ,
[r>1, 17];

2) ,

, r>1.
() ;

3) (
),
,
. -
(1)

dM/dt= k1SC, (24)

S - , - .
,
,
.

(2) (()
(. 8) [ 18
19]:

dM/dt=DSC/(=k2SC. (25)

(3) ,
s (s-(surface():

dM/dt=k1SCs=k2S(C-Cs). (26)

k1,

dM/dt=k1k2SC/(k1+k2)=k3SC (27)

(24), (25), (26)
,
.
.

, , :

1) 1-6 /
[ 23].

2) .
NO
HNO3. (NO) .
.

3)
.

4) .
HNO3 ((H=100 /),
,
, .

- .

,
[ 24], :

1) ;

2) ;

3) 8-20 /.

.


- ,
- (-).

SiO2.

,- ,
.
,
. SiO2
SiO4.
SiO2,
(0.14 ), Si(O (16 ). Si(F 1.5
Si(O.
SiO2, :

1) ;

2) ;

3) ;

4) ;

5) ,
;

6) , .

SiO2
, , .

- , ,
,
(. 3).

3. SiO2 (7;1) HF.



(/)



1)









1.0

8.5

3-10

0.5

3-5

1) 0.1 / (20).

SiO2 HF
,
.

Si3N4 (. 9). 30:1
( ) NH4F HF. , ,
(Si3N4) SiO2
. SiO2
Si(O.
HF (7 40- NH4F
HF) :



. 9. 6:1
NH4/HF : - Si3N4; - .
() 30:1 NH4F/HF
.

HF (k1( H+ + F-, k1=10-3, (28)

HF+F- (k2( HF-2, k2=10-1. (29)

HF HF-2.
, ,
-. . 10
HF-2 HF. ,
SiO2

d(SiO2)/dt=A(HF)+B(HF-2)+C, (30)

HF 10-3,
4 (0.925 /).
HF ,
,
.

,


HF , ,


.
SiO2, SiF4
,
SiF62-.



6HF + SiO2 ( H2SiF6 + 2H2O (31)

, NH4F H2F6 HF
HF2-.
H2SiF6
(NH4)2SiF6 :

H2SiF6 + NH4F ( (NH4)2SiF6 + HF (32)

(NH4Cl, -Br, -I)
(. 4),
.

4. SiO2.

(/)



F-

Cl-

Br-

I-

1.0

2.0

2.3

3.3



.



Si + [O] ( SiO2 + 14/ (33)

SiO2 :

6HF + SiO2 ( H2SiF6 + H2O - 11/ (31)

HF/HNO3

Si+2HNO3+6HF ( H2SiF6+2HNO3+ 2H2O+125/ (34)

. 11. dM/dt 1000/
Si HNO3/HF.

. 12.
(((dM/dt) Si
.




Si3N4 SiO2 ( ).
, HF(HNO3 .


Si + 2OH- + H2O ( SiO2 + 2H2 (35)

, OH- ,
- SiO3+. ,
. H2
.

. 13.

<100> <110>.



. (,
)
1.00 : 0.71 : 0.58.
(100) -
,
, (110), (111), (100) (211)
.
. ,
, ,
,
,
. <100>
100 , <111>. . 13
54-
110/100/111 KOH 85. KOH
55:1
<100> <111>.

,
(111),
.
4 /,
.

. 14. () ()

.

-
8 /:

2NH2(CH2)2NH2+Si+3((OH)2 (

( 2H2+Si((O2)3+2NH2(CH2)3NH3 (36)

1000 ppm (1 ppm=1 )
11
/ (100) (111) 10 20.

SiO2. , ,
.

5. .



, /

(/)1)

PS ES BS PS ES BS

2)

3)

4) 3

0.8

0.7 4

0.6

0.9 4

0.5

1.1 1.5d

1.0d

(0.1-1.0)d 1.5d

1.0d

<0.1d 1.5d

1.0d

<0.1d

1) d- . 2) HNO3 (65%)/HF(40%)/NaNO2=95/5 /.

3) HNO3(65%)/H2O/HF(40%)=100/40/6. 4) KOH/H2O/n-=15/50/15 .

6. .







HF, HNO3, CH3COOH

HF, HNO3, CH3COOH

HF, KMnO4, CH3COOH

HF, HNO3, H2O2+NH4OH

HF, HNO3, CH3COOH

HF, HNO3

NH4F, H2O2

HF, HNO3, I2

HF, HNO3, CH3COOH

HNO3, HBF4, NH4BF4

NH4F, H2O2, NH4HPO4

KOH+

Si

Si

Si

Cu

pnp -

pnp -





(100)

AZ-1350

, Si/=2/1

Si

7. .







, , H7O

,

, , H2O

, sec-

,

, ,

, , H2O

R3N+OH, , H2O

R3N+OH, - -

R3N+OH

H3PO4+ As2O3

CuF2, AZ-1350

100

SiO2, Si3N4,

100, Al-

100

-

Al

100

100

H2

Na+

n-



.


.
.
, ,
.
Si3N4/SiO2,
.
Si3N4 HF H3PO4 180.
.
Si3N4 HF ,
SiO2:

C =(HF)+B(HF2-)+C (37)

Si3N4. HF
, - 10 / -
Si3N4 SiO2: 1) 2) HF/HF2-.
10 /, 10%-
. HF SiO2
, (4 /).
,
SiO2 Si3N4 10 /. , ,
Si Al,
.
Al.

,

( 50% ), . HF
NH4F. Si3N4/SiO2
. 16.

, ,
, SiO2/ Si3N4
. , W,
Si3N4 .
/ Si3N4/
70% H3PO4, 29% 1% HBF4
103. HBF4
KTFR AZ-1350.

.


. ,


M ( Mn+ + ne. (38)

.
.

.
+. -
,
:



(F = -n(, (39)

(F - , ( -
(. 8).

8. .











Al

Zn

Cr

Ni

F2

H2O2

MnO4-

Cr2O72-

Sn

Cu

Ag

Au

Br2

HNO3

Fe2+

I2



Al
(. 1) 1-2 .
(1 . ,
- , ,
.


[. (38)] ( ),

. , Al NaOH
7 . Pt/Au 1 .

.

.
, H3PO4 (76%),
(15%), (3%)
(5%) . ,
- Al3+ AlPO4,
:

Al2O3 (( Al (-3HNO3( Al3+ ((

(( (( AlPO4. (40)

Al2O3,
AlPO4.
. ,
.

Al H3PO4/HNO3 13.2 /,
Al2O3 H3PO4.
2, NO NO2.
Al .
-
,
.

- - -
-
HNO3 (. 17). -,
. - -
NO2 ,
.
(. 17)
Al 34.
105 103 0.8
0.4 .
.

Al 1.0 0. 25
(. 9),
() .

9. .



1)





1. Na3PO4, Na2CO3, K3FeCN6

2. K3FeCN6

3. H3PO4, HCLO4, H2O,

4. H3PO4, HNO3, ,

5. HCl

6. HCl, HNO3, Cu(NO3)2

7. ,

8. -

,



,







0.5





0.25

, Al;
,

Al/Cu



Al



1) - , KTFR; -
, AZ-1350.

Al :

1) ;

2) ;

3) ;

4) - Al-Cu;

5) ;

6) (>(1).

.

,
.
. /HNO3.

( Cr2O3)
,
.

.

. 18.
I - .

-
I.
.
(<1(), -
. -
- - ,
.

.

()
,
.

10. .











































,












, .

.
(HF) .
.
-
, - ,
, .
,
.

,
,
.
.
(0.4-1.0 ),
.

.


.
,
.
.

, .


, .
. ,
1 SiO2 6 HF. ,
25% 100- 2 HF
1:7 (. . 10).
8 16 HF.

SiO2 + 6HF ( H2SiF6 + 2H2O. (41)

20% ,
HF 20% (.10). SiO2
t=0.5 (
SiO2:

SiO2 = ( r2 t (/ SiO2 =

= 3.14(25 2) 5(10-5 (2.3 /3)/60 (42)

4.8(10-4 HF, ,
20%- ( 3.2
HF) 25000 .
500 , 50
( ).

.

- .
, ,
.
, ,

.

.
-1.5-2.0 - -
(0.2-0.5 . .

1. [ ]. . . . . .
.: , 1965.

2. . -/ . . - .2. - .:
, 1969.

3. . ., . .
. - : , 1990.

4.
.[. : 10 .]. - : . ., 1989.

5. . ., . ., . .
// . -
1986.- 4.-.14-17.

6. . . GaAs. .: /
. - : , 1981.

7. . ., . .
GaAs// . -1988.-8.-. 39-40.

8. . . . .: , 1978.



.........F

Si D

.........F

H ( F

( (

O ( H

Si Si

HF

O

Si Si

F F

Si


?
?
?