Жидкостное химическое травление (WinWord&CorelDraw)
. . .
:
: . .
: . .
1996 .
. .
.
.
1. . 3
1.1. . 5
1.2. . 8
1.3. . 9
2. . 11
2.1. SiO2. 11
2.2. . 14
2.3. . 19
2.4. . 20
2.5. . 21
2.6. . 23
3. 23
.
3.1. . 24
4. . 25
5. . 26
.
()
, ,
, ,
.
.
( );
. -
,
() (() (. . 1).
,
((0.1 ),
((0.5 )
(1.0 (1.0 .
. 1.
.
( )
D .
,
(L),
, D/L((1 (. 2).
,
- L D.
.
, (D)
(L).
D ,
.
L/D,
.
, ..
, , .
-
.
. 2. () ()
. R-, S-.
,
.
.
.
,
. 3. ( ),
(D/L>2) .
. . 3
. D/L 1 (
).
(, (r
(L):
(r=(-2L. (1)
. 4. (W) () .
Si3N4 0.25 .
1- (D/L=3)
0.2 1 ,
() 0.05-0.1
.
D/L=10, 1
0.7 .
Si3N4
. 4.
.
+(;
,
. Al
Si Cu,
Al (. 1).
, ,
.
, ,
.
, ,
, .
,
(F
+(S, (
( )
(F=(-(S. (2)
,
, (=+11 /:
SiO2(.)+6HF(.)(2SiF6+2H2O. (3)
1. .
Ag, Al, Au, Cr, Cu, Mo, Ni, Pb, Pt, Ta, Ti,W
Si, Ge, GaAs
SiO2, Si3N4, ,
. , ,
, , ,
.
(. 2).
2. .
(111)
(110)
(100)
0.58
0.71
1.00
0.62
0.89
1.00
( )
(.) (n+(.)+ne. (4)
:
(.) (() , (5)
() ( n+()+ne , (6)
n+()+2 ( n+(.) . (7)
( ), (
().
( )
.
,
( 4), (. 5),
. , ,
. n+ ,
( ).
. 5.
(+) (-).
.
- .
- ,
:
ne+ Xn- (Xn. (8)
- , (F,
(F=-n(, (9)
( , -
. :
1) , , ,
;
2) ;
3) ;
4) ;
5) .
,
- :
SiO2+6HF (H2SiF6+2H2O, (10)
SiO2+CF4() (SiF4+CO2. (11)
Si(O- Si(F. Si(O Si(F
, , .
.
,
.
:
1) ;
2) (ads;
3) (F;
4) (vap;
5) .
.
=k , (12)
=kE . (13)
()
.
.
(. .
, ).
.
,
.
(
) .
.
-
- .
,
:
1) (
;
2) ( ,
;
3) ( , ,
.
.
+ (k( (14)
SiO2(.)+6HF(.) ( H2SiF6+2H2O, (15)
SiO2+CF4 ( SiF4+CO2. (16)
r
r=(m/d)/(M/D), (17)
. 7. ()
(R).
. ,
.
(. 8). dM,
S dt, S , dM,
dC/dx x
S
dM/dt=-DSdC/dx, (18)
S. - -
.
- . D
(():
D=RT/(, (19) dM/dt= (
(D (1/(, (20) (D=constT, (21) (=exp(Evis/RT), (22)
Evis=Eetch. (23)
:
1) ,
[r>1, 17];
2) ,
, r>1.
() ;
3) (
),
,
. -
(1)
dM/dt= k1SC, (24)
S - , - .
,
,
.
(2) (()
(. 8) [ 18
19]:
dM/dt=DSC/(=k2SC. (25)
(3) ,
s (s-(surface():
dM/dt=k1SCs=k2S(C-Cs). (26)
k1,
dM/dt=k1k2SC/(k1+k2)=k3SC (27)
(24), (25), (26)
,
.
.
, , :
1) 1-6 /
[ 23].
2) .
NO
HNO3. (NO) .
.
3)
.
4) .
HNO3 ((H=100 /),
,
, .
- .
,
[ 24], :
1) ;
2) ;
3) 8-20 /.
.
- ,
- (-).
SiO2.
,- ,
.
,
. SiO2
SiO4.
SiO2,
(0.14 ), Si(O (16 ). Si(F 1.5
Si(O.
SiO2, :
1) ;
2) ;
3) ;
4) ;
5) ,
;
6) , .
SiO2
, , .
- , ,
,
(. 3).
3. SiO2 (7;1) HF.
(/)
1)
1.0
8.5
3-10
0.5
3-5
1) 0.1 / (20).
SiO2 HF
,
.
Si3N4 (. 9). 30:1
( ) NH4F HF. , ,
(Si3N4) SiO2
. SiO2
Si(O.
HF (7 40- NH4F
HF) :
. 9. 6:1
NH4/HF : - Si3N4; - .
() 30:1 NH4F/HF
.
HF (k1( H+ + F-, k1=10-3, (28)
HF+F- (k2( HF-2, k2=10-1. (29)
HF HF-2.
, ,
-. . 10
HF-2 HF. ,
SiO2
d(SiO2)/dt=A(HF)+B(HF-2)+C, (30)
HF 10-3,
4 (0.925 /).
HF ,
,
.
,
HF , ,
.
SiO2, SiF4
,
SiF62-.
6HF + SiO2 ( H2SiF6 + 2H2O (31)
, NH4F H2F6 HF
HF2-.
H2SiF6
(NH4)2SiF6 :
H2SiF6 + NH4F ( (NH4)2SiF6 + HF (32)
(NH4Cl, -Br, -I)
(. 4),
.
4. SiO2.
(/)
F-
Cl-
Br-
I-
1.0
2.0
2.3
3.3
.
Si + [O] ( SiO2 + 14/ (33)
SiO2 :
6HF + SiO2 ( H2SiF6 + H2O - 11/ (31)
HF/HNO3
Si+2HNO3+6HF ( H2SiF6+2HNO3+ 2H2O+125/ (34)
. 11. dM/dt 1000/
Si HNO3/HF.
. 12.
(((dM/dt) Si
.
Si3N4 SiO2 ( ).
, HF(HNO3 .
Si + 2OH- + H2O ( SiO2 + 2H2 (35)
, OH- ,
- SiO3+. ,
. H2
.
. 13.
<100> <110>.
. (,
)
1.00 : 0.71 : 0.58.
(100) -
,
, (110), (111), (100) (211)
.
. ,
, ,
,
,
. <100>
100 , <111>. . 13
54-
110/100/111 KOH 85. KOH
55:1
<100> <111>.
,
(111),
.
4 /,
.
. 14. () ()
.
-
8 /:
2NH2(CH2)2NH2+Si+3((OH)2 (
( 2H2+Si((O2)3+2NH2(CH2)3NH3 (36)
1000 ppm (1 ppm=1 )
11
/ (100) (111) 10 20.
SiO2. , ,
.
5. .
, /
(/)1)
PS ES BS PS ES BS
2)
3)
4) 3
0.8
0.7 4
0.6
0.9 4
0.5
1.1 1.5d
1.0d
(0.1-1.0)d 1.5d
1.0d
<0.1d 1.5d
1.0d
<0.1d
1) d- . 2) HNO3 (65%)/HF(40%)/NaNO2=95/5 /.
3) HNO3(65%)/H2O/HF(40%)=100/40/6. 4) KOH/H2O/n-=15/50/15 .
6. .
HF, HNO3, CH3COOH
HF, HNO3, CH3COOH
HF, KMnO4, CH3COOH
HF, HNO3, H2O2+NH4OH
HF, HNO3, CH3COOH
HF, HNO3
NH4F, H2O2
HF, HNO3, I2
HF, HNO3, CH3COOH
HNO3, HBF4, NH4BF4
NH4F, H2O2, NH4HPO4
KOH+
Si
Si
Si
Cu
pnp -
pnp -
(100)
AZ-1350
, Si/=2/1
Si
7. .
, , H7O
,
, , H2O
, sec-
,
, ,
, , H2O
R3N+OH, , H2O
R3N+OH, - -
R3N+OH
H3PO4+ As2O3
CuF2, AZ-1350
100
SiO2, Si3N4,
100, Al-
100
-
Al
100
100
H2
Na+
n-
.
.
.
, ,
.
Si3N4/SiO2,
.
Si3N4 HF H3PO4 180.
.
Si3N4 HF ,
SiO2:
C =(HF)+B(HF2-)+C (37)
Si3N4. HF
, - 10 / -
Si3N4 SiO2: 1) 2) HF/HF2-.
10 /, 10%-
. HF SiO2
, (4 /).
,
SiO2 Si3N4 10 /. , ,
Si Al,
.
Al.
,
( 50% ), . HF
NH4F. Si3N4/SiO2
. 16.
, ,
, SiO2/ Si3N4
. , W,
Si3N4 .
/ Si3N4/
70% H3PO4, 29% 1% HBF4
103. HBF4
KTFR AZ-1350.
.
. ,
M ( Mn+ + ne. (38)
.
.
.
+. -
,
:
(F = -n(, (39)
(F - , ( -
(. 8).
8. .
Al
Zn
Cr
Ni
F2
H2O2
MnO4-
Cr2O72-
Sn
Cu
Ag
Au
Br2
HNO3
Fe2+
I2
Al
(. 1) 1-2 .
(1 . ,
- , ,
.
[. (38)] ( ),
. , Al NaOH
7 . Pt/Au 1 .
.
.
, H3PO4 (76%),
(15%), (3%)
(5%) . ,
- Al3+ AlPO4,
:
Al2O3 (( Al (-3HNO3( Al3+ ((
(( (( AlPO4. (40)
Al2O3,
AlPO4.
. ,
.
Al H3PO4/HNO3 13.2 /,
Al2O3 H3PO4.
2, NO NO2.
Al .
-
,
.
- - -
-
HNO3 (. 17). -,
. - -
NO2 ,
.
(. 17)
Al 34.
105 103 0.8
0.4 .
.
Al 1.0 0. 25
(. 9),
() .
9. .
1)
1. Na3PO4, Na2CO3, K3FeCN6
2. K3FeCN6
3. H3PO4, HCLO4, H2O,
4. H3PO4, HNO3, ,
5. HCl
6. HCl, HNO3, Cu(NO3)2
7. ,
8. -
,
,
0.5
0.25
, Al;
,
Al/Cu
Al
1) - , KTFR; -
, AZ-1350.
Al :
1) ;
2) ;
3) ;
4) - Al-Cu;
5) ;
6) (>(1).
.
,
.
. /HNO3.
( Cr2O3)
,
.
.
. 18.
I - .
-
I.
.
(<1(), -
. -
- - ,
.
.
()
,
.
10. .
,
, .
.
(HF) .
.
-
, - ,
, .
,
.
,
,
.
.
(0.4-1.0 ),
.
.
.
,
.
.
, .
, .
. ,
1 SiO2 6 HF. ,
25% 100- 2 HF
1:7 (. . 10).
8 16 HF.
SiO2 + 6HF ( H2SiF6 + 2H2O. (41)
20% ,
HF 20% (.10). SiO2
t=0.5 (
SiO2:
SiO2 = ( r2 t (/ SiO2 =
= 3.14(25 2) 5(10-5 (2.3 /3)/60 (42)
4.8(10-4 HF, ,
20%- ( 3.2
HF) 25000 .
500 , 50
( ).
.
- .
, ,
.
, ,
.
.
-1.5-2.0 - -
(0.2-0.5 . .
1. [ ]. . . . . .
.: , 1965.
2. . -/ . . - .2. - .:
, 1969.
3. . ., . .
. - : , 1990.
4.
.[. : 10 .]. - : . ., 1989.
5. . ., . ., . .
// . -
1986.- 4.-.14-17.
6. . . GaAs. .: /
. - : , 1981.
7. . ., . .
GaAs// . -1988.-8.-. 39-40.
8. . . . .: , 1978.
.........F
Si D
.........F
H ( F
( (
O ( H
Si Si
HF
O
Si Si
F F
Si
